X-Ray Fluorescence Process Example: Titanium Atom (Ti=22)

An electron in the K shell is ejected from the atom by an external primary excitation x-ray, creating a vacancy.

An electron from the L or M shell "jumps in" to fill the vacancy. In the process, it emits a characteristic x-ray unique to this element and in turn, produces a vacancy in the L or M shell.

When a vacancy is created in the L shell by either the primary excitation x-ray or by the previous event, an electron from the M or N shell "jumps in" to occupy the vacancy. In this process, it emits a characteristic x-ray unique to this element and in turn, produces a vacancy in the M or N shell.

The excitation energy from the inner atom is transferred to one of the outer electrons causing it to be ejected from the atom.